ABSTRACT
The e-beam stimulated reaction, CdCI2(s) ---> Cd (s) + CI(g), has been studied in casmium chloride thin films between 303 and 483 K using 2-keV electrons. The dose required to make 90-nm-deep holes at 483 K is 3x10-3 C cm -2. Extrapolated dosing levels of 6x10-5 C cm -2 are expected. The use of CdCI2 as a positive-type electron resist in a new scheme is proposed. A working model, useful for considering the e-beam stimulated decomposition energetics and mechanism is briefly discussed.
Green, M , Aidinis, C & A., A (2021). Electron Beam Decomposition of CdCI2. Afribary. Retrieved from https://afribary.com/works/electron-beam-decomposition-of-cdci2
Green, Mino et. al. "Electron Beam Decomposition of CdCI2" Afribary. Afribary, 15 May. 2021, https://afribary.com/works/electron-beam-decomposition-of-cdci2. Accessed 16 Apr. 2024.
Green, Mino, C.J. Aidinis and And A. . "Electron Beam Decomposition of CdCI2". Afribary, Afribary, 15 May. 2021. Web. 16 Apr. 2024. < https://afribary.com/works/electron-beam-decomposition-of-cdci2 >.
Green, Mino , Aidinis, C.J. and A., And . "Electron Beam Decomposition of CdCI2" Afribary (2021). Accessed April 16, 2024. https://afribary.com/works/electron-beam-decomposition-of-cdci2