Real time spectroscopic ellipsometry has been applied to develop deposition phase diagrams that can guide the fabrication of hydrogenated silicon (Si: H) thin films at low temperatures (< 300° C) for highest performance electronic devices such as solar cells. The simplest phase diagrams incorporate a single transition from the amorphous growth regime to the mixed-phase (amorphous+ microcrystalline) growth regime versus accumulated film thickness [the a→(a+ μc) transition].
Pearce, J. (2019). Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystalline silicon studied by real time spectroscopic ellipsometry. Afribary. Retrieved from https://afribary.com/works/evolution-of-microstructure-and-phase-in-amorphous-protocrystalline-and-microcrystalline-silicon-studied-by-real-time-spectroscopic-ellipsometry
Pearce, Joshua "Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystalline silicon studied by real time spectroscopic ellipsometry" Afribary. Afribary, 22 Apr. 2019, https://afribary.com/works/evolution-of-microstructure-and-phase-in-amorphous-protocrystalline-and-microcrystalline-silicon-studied-by-real-time-spectroscopic-ellipsometry. Accessed 30 Apr. 2024.
Pearce, Joshua . "Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystalline silicon studied by real time spectroscopic ellipsometry". Afribary, Afribary, 22 Apr. 2019. Web. 30 Apr. 2024. < https://afribary.com/works/evolution-of-microstructure-and-phase-in-amorphous-protocrystalline-and-microcrystalline-silicon-studied-by-real-time-spectroscopic-ellipsometry >.
Pearce, Joshua . "Evolution of microstructure and phase in amorphous, protocrystalline, and microcrystalline silicon studied by real time spectroscopic ellipsometry" Afribary (2019). Accessed April 30, 2024. https://afribary.com/works/evolution-of-microstructure-and-phase-in-amorphous-protocrystalline-and-microcrystalline-silicon-studied-by-real-time-spectroscopic-ellipsometry